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Fundamental gas-phase and surface chemistry of vapor-phase deposition II and Process control, diagnostics and modeling in semiconductor manufacturing IV：proceedings of the internatioal symposium

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Bibliographic Details
Corporate Authors: Symposium on Fundamental Gas-Phase and Surface Chemistry of Vaper-Phase Materials Synthesis (2nd 2001 Washington, D.C; Electrochemical Society. Dielectric Science and Technology Division; Electrochemical Society. High Temperature Materials Division
Group Author: Allendorf Mark Donald; Meyyapan M; Swihart Mark T
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c2001.
Literature type: Book
Language: English
Series: Proceedings ; v. 2001-13.
Subjects:
Gases, Ionized
Chemical vapor deposition
Surface chemistry
Carrier Form: ix, 508 p.: ill. ; 26 cm.
ISBN: 1566773199
Index Number: TN304
CLC: TN304.055-532
O647.11-532
Call Number: O647.11-532/S989/2001
Contents: "High Temperature Materials and Dielectric Science and Technology Divisions."
Incudes bibliographical references and index.

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