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Laser-based micro- and nanoprocessing XVII : 31 January- 2 February 2023, San Francisco, California, United States /

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Bibliographic Details
Corporate Authors: Laser-based Micro- and Nanoprocessing (Conference) San Francisco, California, United States); SPIE (Society)
Group Author: Pflegin, Wilhelm (Editor); Watanabe, Akira (Editor); Kling, Rainer (Editor)
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2023]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 12409
Subjects:
Electronic packaging > Congresses.
Lasers > Industrial applications > Congresses.
Micromachining > Congresses.
Micromechanics > Congresses.
Item Description: "At SPIE LASE" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 27 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510659230
CLC: TN249-532
Call Number: TN249-532/L343-8/2023

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