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Micromachining technology for micro-optics and nano-optics：28-29 January 2003, San Jose, California, USA

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Bibliographic Details
Corporate Authors: Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers; Semiconductor Equipment and Materials International
Group Author: Johnson Eric G
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2003.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4984
Subjects:
Optoelectronic devices > Design and construction
Micromachining
Microelectromechanical systems
Nanotechnology
Integrated optics
Miniature electronic equipment > Design and construction
Carrier Form: xlii, 262 p.: ill. ; 28 cm.
ISBN: 0819447846
Index Number: TN25
CLC: TN25-532
TN2-532
TB133-532
Call Number: TN25-532/M626-4/2003
Contents: Earlier conference has title: Micromachining technology for micro-optics.
Includes bibliographical references and index.

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