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Atomic layer deposition applications 6

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Bibliographic Details
Corporate Authors: Meeting of the Electrochemical Society 2010.10.10-15 Las Vegas, Nev.); Electrochemical Society; Symposium on Atomic Layer Deposition Applications 2010.10.10-15 Las Vegas, Nev.)
Group Author: Elam J. W
Published: Electrochemical Society,
Publisher Address: Pennington
Publication Dates: 2010.
Literature type: Book
Language: English
Series: ECS transactions ; vol 33 no 2
Subjects:
Atomic layer deposition applications > Electrochemical > ECS
Carrier Form: ix, 455 p.: ill. ; 23 cm.
ISBN: 9781566778213 (hc.)
1566778212
9781607681717
1607681714
Index Number: O641
CLC: O641-532
O647.11-532
Call Number: O641-532/A881/2010
Contents: Includes bibliographical references and index.

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