Screen LibraryLaser applications in microelectronic and optoelectronic manufacturing III：26-28 January 1998, San Jose, California
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| Corporate Authors: | |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
|
| Publisher Address: | Bellingham, Wash., USA |
| Publication Dates: | c1998. |
| Literature type: | Book |
| Language: | English |
| Series: |
SPIE proceedings series ; v. 3274 |
| Subjects: | |
| Carrier Form: | ix, 344 p.: ill. ; 28 cm. |
| ISBN: | 0819427136 |
| Index Number: | TN249 |
| CLC: | TN249-532 |
| Call Number: | TN249-532/L343.5/1998/ |
| Contents: | Includes bibliographical references and index. |