Laser applications in microelectronic and optoelectronic manufacturing III:26-28 January 1998, San Jose, California
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Corporate Authors: | |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c1998. |
Literature type: | Book |
Language: | English |
Series: |
SPIE proceedings series ; v. 3274 |
Subjects: | |
Carrier Form: | ix, 344 p.: ill. ; 28 cm. |
ISBN: | 0819427136 |
Index Number: | TN249 |
CLC: | TN249-532 |
Call Number: | TN249-532/L343.5/1998/ |
Contents: | Includes bibliographical references and index. |