Optics and Photonics for Advanced Dimensional Metrology II : 5-7 April 2022, Strasbourg, France ; 9-20 May 2022, Online /

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Bibliographic Details
Corporate Authors: Optics and Photonics for Advanced Dimensional Metrology Strasbourg, France ; Online); SPIE (Society)
Group Author: Groot, Peter J. de (Editor); Leach, Richard (Editor); Picart, Pascal (Editor)
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2022]
Literature type: Book
Language: English
Series: Proceedings of SPIE--the International Society for Optical Engineering ; volume 12137. 0277-786X
Subjects:
Item Description: "At SPIE Photonics Europe" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510651500
CLC: TB96-532
Call Number: TB96-532/O627-2/2022