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Advances in metrology for X-ray and EUV optics IV：12 August 2012, San Diego, California, United States

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Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Takacs Peter Z; Asundi Anand; Assoufid Lahsen
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: 2012.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; 8501
Subjects:
Metrology > EUV optics
Optical instruments > Design and construction
Measuring instruments > Design and construction
Laser interferometers
Measurement
Optical measurements
Carrier Form: 1 v. (various pagings): ill. ; 28 cm.
ISBN: 0819492183 (pbk.)
9780819492180 (pbk.)
Index Number: O439
CLC: O439-532
TB96-532
Call Number: TB96-532/A244-1/2012
Contents: Includes bibliographical references and index.

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