Silicon science and advanced micro-device engineering I：selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan

Corporate Authors: International Symposium on Silicon Science (5th 2009 Kiryū-shi, Japan; International Conference on Advanced Micro-Device Engineering 2009 Kiryū-shi, Japan); Gunma Daigaku. International Education and Research Center for Silicon Science; Gunma Daigaku. Advanced Technology Research Center
Group Author: Hanaizumi Osamu; Unno Masafumi
Published: Trans Tech Publications,
Publication Dates: 2011
Call Number: TN304.12-532/I613/2009