MOEMS and miniaturized systems III：27-29 January 2003, San Jose, California, USA

Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Krulevitch Peter A; Lakner Hubert K; Smith James H
Published: SPIE,
Publication Dates: c2003.
Call Number: TN25-532/M626-1/2003