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1

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Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Corporate Authors: International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (2nd 1992 Phoenix, Ariz; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectric Science and Technology Division
Group Author: Ruzyllo Jerzy; Novak Richard E
Published: Electrochemical Society,
Publication Dates: c1992.
Call Number: TN305.99-532/I61/1992/

Book

2

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Semiconductor cleaning technology, 1989：proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Corporate Authors: International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (1st 1989 Hollywood, Fla; Electrochemical Society. Dielectrics and Insulation Division; Electrochemical Society. Electronics Division
Group Author: Novak Richard E; Ruzyllo Jerzy
Published: Electrochemical Society,
Publication Dates: c1990.
Call Number: TN305-53/I61.3/1989/

Book

3

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Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

Corporate Authors: Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing (2nd 1993 Honolulu, Hawaii; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectric Science and Technology Division
Group Author: Novak Richard E
Published: Electrochemical Society,
Publication Dates: c1994.
Call Number: TN304.05-532/S989/1993/

Book

4

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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Corporate Authors: International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (4th 1995 Chicago, Ill; Electrochemical Society. Electronics Division
Group Author: Novak Richard E; Ruzyllo Jerzy
Published: Electrochemical Society,
Publication Dates: c1996.
Call Number: TN305.99-532/I61/1995/

Book

5

Cover is for reference only

Semiconductor cleaning technology, 1989：proceedings of the..., [held at the Electrochemical Society Fall Meeting in Hollywood, Florida, Oct. 15-20, 1989]

Corporate Authors: International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (1st 1989 Hollywood, Fla
Group Author: Novak Richard E; Ruzyllo Jerzy
Published: Electrochemical Society,
Publication Dates: c1990.
Call Number: TN605-53/I61.2/1989/

Book

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