Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology

Corporate Authors: International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd 1990 Montréal, Québec; Electrochemical Society. Electronics Division; Electrochemical Society. Dielectric Science and Technology Division
Group Author: Pantelides Sokrates T; Srinivasan G. R; Plummer J
Published: Electrochemical Society,
Publication Dates: c1991.
Call Number: TN305-532/I61.1/1990