Micromachining and microfabrication process technology X：25-27 January 2005, San Jose, California, USA

Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Stewart Harold D; Perez-Maher Mary Ann
Published: SPIE,
Publication Dates: c2005.
Call Number: TH11-532/M626.2/2005