High resolution focused ion beams：FIB and its applications : the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology

Main Authors: Orloff Jon
Group Author: Swanson Lynwood 1934-; Utlaut Mark William 1949-
Published: Kluwer Academic/Plenum Publishers,
Publication Dates: c2003.
Call Number: TL501/O72