Introduction to microlithography：theory, materials, and processing

Corporate Authors: American Chemical Society. Meeting 1983 Seattle, Wash.) (Seattle, Wash.)); American Chemical Society. Division of Organic Coatings and Plastics Chemistry.
Group Author: Willson C. G.; (C. Grant) 1939-; Bowden M. J., 1943-; Thompson L. F., 1944-
Published: The Society,
Publication Dates: 1983.
Call Number: TS828-53/I61/1983/