Smart sensors and MEMS：[proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003]

Corporate Authors: NATO Advanced Study Institute on Smart Sensors and MEMS (2003 Póvoa de Varzim, Portugal)
Group Author: Yurish Sergey Y.; Gomes Maria Teresa S. R.
Published: Kluwer Academic,
Publication Dates: c2004.
Call Number: TP212-532/S636-3/2003