Materials and device characterization in micromachining III：18-19 September 2000, Santa Clara, USA

Corporate Authors: Semiconductor Equipment and Materials International; Solid State Technology Organization; Sandia National Laboratories; Society of Photo-Optical Instrumentation Engineers
Group Author: Coane Philip J; Vladimirsky Yuli
Published: SPIE,
Publication Dates: c2000.
Call Number: TH11-532/M425/2000