Gettering and defect engineering in semiconductor technology XIII：GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Dölnsee-Schorfheide, north of Berlin, Germany, September 26-October 02, 2009/

Corporate Authors: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" (13th 2009 Dölnsee-Schorfheide, Germany
Group Author: Richter H 1940-; Kittler Martin
Published: Trans Tech Publications,
Publication Dates: c2010.
Call Number: TN3-532/G394/2009