Micromachined mirrors
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Main Authors: | |
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Published: |
Kluwer Academic Publishers,
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Publisher Address: | Boston |
Publication Dates: | c2003. |
Literature type: | Book |
Language: | English |
Series: |
The Kluwer international series in microsystems |
Subjects: | |
Carrier Form: | xvi, 139 p.: ill. ; 25 cm. |
ISBN: | 1402073127 (alk. paper) |
Index Number: | TH11 |
CLC: |
TH11 TH74 |
Call Number: | TH74/C743 |
Contents: | Includes bibliographical references (p. [133]-139). |