Advances in mirror technology for X-ray, EUV lithography, laser and other applications II:5 August, 2004, Denver, Colorado, USA

Saved in:
Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Dinger Udo; Ota Kazuya; Khounsary Ali M
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2004.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5533
Subjects:
Carrier Form: ix, 194 p.: ill. ; 28 cm.
ISBN: 0819454710
Index Number: TH74
CLC: TH74-1
TH74-532
Call Number: TH74-532/A244/2004
Contents: Includes bibliographical references and author index.