Screen LibraryCharacterization and metrology for ULSI technology：1998 international conference, Gaithersburg, Maryland, March 1998
Saved in:
| Corporate Authors: | |
|---|---|
| Group Author: | |
| Published: |
American Institute of Physics,
|
| Publisher Address: | Woodbury, NY |
| Publication Dates: | c1998. |
| Literature type: | Book |
| Language: | English |
| Series: |
AIP conference proceedings ; 449 |
| Subjects: | |
| Carrier Form: | xv, 960 p.: ill. ; 28 cm. +1 computer optical disk |
| ISBN: |
1563967537 (set) 1563968681 (CD-ROM) 1563968673 (print) |
| Index Number: | TN47 |
| CLC: | TN47-532 |
| Call Number: | TN47-532/C469/1998 |
| Contents: |
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref. Accompanying computer disc contains full text from the book. Includes bibliographical references and indexes. |