Characterization and metrology for ULSI technology:1998 international conference, Gaithersburg, Maryland, March 1998
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Corporate Authors: | |
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Group Author: | |
Published: |
American Institute of Physics,
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Publisher Address: | Woodbury, NY |
Publication Dates: | c1998. |
Literature type: | Book |
Language: | English |
Series: |
AIP conference proceedings ; 449 |
Subjects: | |
Carrier Form: | xv, 960 p.: ill. ; 28 cm. +1 computer optical disk |
ISBN: |
1563967537 (set) 1563968681 (CD-ROM) 1563968673 (print) |
Index Number: | TN47 |
CLC: | TN47-532 |
Call Number: | TN47-532/C469/1998 |
Contents: |
"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref. Accompanying computer disc contains full text from the book. Includes bibliographical references and indexes. |