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Micro- and nanotechnology：materials, processes, packaging, and systems II : 13-15 December 2004, Sydney, Australia

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Bibliographic Details
Corporate Authors: University of New South Wales; University of Adelaide; International Symposium on Smart Materials, Nano-, and Micro-Smart Systems (2004 University of New South Wales); Society of Photo-Optical Instrumentation Engineers
Group Author: Chiao Jung-Chih
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2005.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5650
Subjects:
Microtechnology > Materials
Nanotechnology > Materials
Electronic packaging
Microelectromechanical systems
Carrier Form: xlviii, 572 p.: ill. ; 28 cm.
ISBN: 0819456101
Index Number: R318
CLC: R318-532
TB4-532
Call Number: R318-532/M626-1/2004
Contents: "Part of SPIE's 2004 International Symposium on Smart Materials, Nano-, and Micro-Smart Systems, held at University of New South Wales, Sydney, Australia, on 12-15 December 2004"--P. xiii.
Includes bibliographical references and author index.

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