Micro- and nanotechnology:materials, processes, packaging, and systems IV : 10-12 December 2008, Melbourne, Australia
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Corporate Authors: | ; |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2008. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 7269 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
9780819475213 0819475211 |
Index Number: | R318 |
CLC: |
R318-532 TB4-532 |
Call Number: | R318-532/M626-1/2008 |
Contents: | Includes bibliographical references and index. |