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Optical microlithography and metrology for microcircuit fabrication：proceedings, ECO2, 27-28 April, 1989, Paris, France

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Bibliographic Details
Corporate Authors: European Congress on Optics (2nd 1989 Paris, France; European Federation for Applied Optics; Society of Photo-Optical Instrumentation Engineers; Association nationale de la recherche technique; European Physical Society
Group Author: Wittekoek Steve; Lacombat Michel J
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c1989.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 1138
Subjects:
Microlithography > Congresses
Integrated circuits > Design and construction > Congresses
Carrier Form: vii, 206 p.: ill. ; 28 cm.
ISBN: 0819401749
Index Number: TN405
CLC: TN405-532
Call Number: TN405-53/O62/1989/
Contents: "The Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering; cooperating organizations, ANRT--Association nationale de la recherche technique ... [et al.]."
Includes biliographical references and index.

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