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Optical microlithography VI：4-5 March 1987, Santa Clara, California

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Stover Harry L
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c1987.
Literature type: Book
Language: English
Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 772
Subjects:
Microlithography > Congresses
Integrated circuits > Very large scale integration > Congresses
Carrier Form: vi, 292 p.: ill. ; 28 cm.
ISBN: 0892528079 (pbk.)
Index Number: TS828
CLC: TS828-532
Call Number: TS828-53/O62/1987/
Contents: Includes bibliographies and index.

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