Optical microlithography VI:4-5 March 1987, Santa Clara, California
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Corporate Authors: | |
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Group Author: | |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash., USA |
Publication Dates: | c1987. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE--the International Society for Optical Engineering ; v. 772 |
Subjects: | |
Carrier Form: | vi, 292 p.: ill. ; 28 cm. |
ISBN: | 0892528079 (pbk.) |
Index Number: | TS828 |
CLC: | TS828-532 |
Call Number: | TS828-53/O62/1987/ |
Contents: | Includes bibliographies and index. |