Screen LibraryHandbook of silicon based MEMS materials and technologies /
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...
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| Corporate Authors: | |
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| Group Author: | |
| Published: |
William Andrew is an imprint of Elsevier,
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| Publisher Address: | London, UK : |
| Publication Dates: | 2015. |
| Literature type: | eBook |
| Language: | English |
| Edition: | Second edition. |
| Series: |
Micro & nano technologies
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| Subjects: | |
| Online Access: |
http://www.sciencedirect.com/science/book/9780323299657 |
| Summary: |
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafe |
| Carrier Form: | 1 online resource : illustrations. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: |
9780323312233 0323312233 0323299652 9780323299657 |
| Index Number: | TK7875 |
| CLC: | TN4 |