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Handbook of silicon based MEMS materials and technologies /

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical method...

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Bibliographic Details
Corporate Authors: Elsevier Science & Technology
Group Author: Lindroos, Veikko
Published: William Andrew/Elsevier,
Publisher Address: Amsterdam ; Boston :
Publication Dates: 2010.
Literature type: eBook
Language: English
Edition: First edition.
Series: Micro & nano technologies
Subjects:
Microelectromechanical systems
Microelectromechanical systems > Materials
Silicon > Electric properties
TECHNOLOGY & ENGINEERING > Electronics > Solid State
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors
MEMS
Silicium
Electronic books
Online Access: http://www.sciencedirect.com/science/book/9780815515944
Summary: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. . Key topics covered include: .: . .; Silicon as MEMS material .; Material properties and measurement techniques .; Analytical methods used in materials characterization .; Modeling in MEMS .; Measuring MEMS .; Micromachining technologies in MEMS .; Encapsulation of MEMS components .; Emerging process technologies, including ALD and porous silicon ... Written by 73 world class MEMS contributors from around the glo.
Carrier Form: 1 online resource (xxxii, 636 pages) : illustrations.
Bibliography: Includes bibliographical references and index.
ISBN: 9780080947723
0080947727
Index Number: TK7875
CLC: TN4
Contents: Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index.

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