Proceedings of the Tenth Symposium on Plasma Processing
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society.
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1994. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings Electrochemical Society ; v. 94-20 |
Subjects: | |
Carrier Form: | xi, 606 p.: ill. ; 23 cm. |
ISBN: | 1566770777 |
Index Number: | TN405 |
CLC: |
TN405-532 O539-532 |
Call Number: | O539-532/S989/1994/ |
Contents: |
"Dielectric Science and Technology and Electronics Divisions." Spine title: Plasma processing. This proceedings volume contains the papers presented at the Thenth Symposim on Plasma processing, held at San Francisco, CA, May 22-27, 1994. Includes bibliographical references and indexes. |