Proceedings of the eleventh International Symposium on Plasma Processing
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Corporate Authors: | ; ; ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society.
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1996. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings ; v. 96-12 |
Subjects: | |
Carrier Form: | xi, 720 p.: ill. ; 23 cm. |
ISBN: | 1566771641 |
Index Number: | O539 |
CLC: |
O539-532 TN405-532 |
Call Number: | O539-532/S989/1996/ |
Contents: |
"Dielectric Science and Technology and Electronics Divisions." Spine title: Plasma processing XI. "This proceedings volume contains the papers presented at the Eleventh Symposium on Plasma Processing, held in Los Angeles, CA, May 5-10, 1996. ... as part of the 198th Meeting of the Electrochemical Society, Inc., Pennington, NJ."--Preface. Includes bibliographical references and indexes. |