Screen LibraryProceedings of the Tenth Symposium on Plasma Processing
Saved in:
| Corporate Authors: | ; ; |
|---|---|
| Group Author: | ; |
| Published: |
Electrochemical Society.
|
| Publisher Address: | Pennington, NJ |
| Publication Dates: | c1994. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings Electrochemical Society ; v. 94-20 |
| Subjects: | |
| Carrier Form: | xi, 606 p.: ill. ; 23 cm. |
| ISBN: | 1566770777 |
| Index Number: | TN405 |
| CLC: |
TN405-532 O539-532 |
| Call Number: | O539-532/S989/1994/ |
| Contents: |
"Dielectric Science and Technology and Electronics Divisions." Spine title: Plasma processing. This proceedings volume contains the papers presented at the Thenth Symposim on Plasma processing, held at San Francisco, CA, May 22-27, 1994. Includes bibliographical references and indexes. |