Semiconductor materials and process technology handbook:for very large scale integration (VLSI) and ultra large scale integration (ULSI)

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Bibliographic Details
Group Author: McGuire G. E
Published: Noyes Publications,
Publisher Address: Park Ridge, N.J., U.S.A.
Publication Dates: c1988.
Literature type: Book
Language: English
Series: Materials science and process technology series
Subjects:
Carrier Form: xiii, 675 p.: ill. ; 25 cm.
ISBN: 0815511507
Index Number: TN47
CLC: TN47-62
Contents: Includes bibliographies and index.