Screen LibraryAdvances in resist materials and processing technology XXIV：26-28 February, 2007, San Jose, California, USA
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| Corporate Authors: | ; |
|---|---|
| Group Author: | |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c2007. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE ; v. 6519 |
| Subjects: | |
| Carrier Form: | 2 v.: ill. ; 28 cm. |
| ISBN: |
9780819466389 0819466387 |
| Index Number: | TS82 |
| CLC: | TS82-532 |
| Call Number: | TS82-532/A244/2007 |
| Contents: |
Previous conference proceedings entitled: Advances in resist technology and processing. Includes bibliographical references and author index. |