Microelectronics processing:chemical engineering aspects
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Group Author: | ; |
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Published: |
American Chemical Society,
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Publisher Address: | Washington, DC |
Publication Dates: | c1989. |
Literature type: | Book |
Language: | English |
Series: |
Advances in chemistry series ; 221 |
Subjects: | |
Carrier Form: | xiv, 547 p.: ill. ; 24 cm. |
ISBN: | 0841214751 |
Index Number: | TN40 |
CLC: | TN40 |
Call Number: | TN40/M626/ |