Screen LibraryMicroelectronics processing：chemical engineering aspects
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| Group Author: | ; |
|---|---|
| Published: |
American Chemical Society,
|
| Publisher Address: | Washington, DC |
| Publication Dates: | c1989. |
| Literature type: | Book |
| Language: | English |
| Series: |
Advances in chemistry series ; 221 |
| Subjects: | |
| Carrier Form: | xiv, 547 p.: ill. ; 24 cm. |
| ISBN: | 0841214751 |
| Index Number: | TN40 |
| CLC: | TN40 |
| Call Number: | TN40/M626/ |