Laser-based Micro- and Nanoprocessing XVI : 22-27 January 2022, San Francisco, California, United States, 20-24 February 2022, online /

Saved in:
Bibliographic Details
Corporate Authors: Laser-Based Micro- and Nanoprocessing (Conference) San Francisco, California, United States); SPIE (Society)
Group Author: Watanabe, Akira (Editor); Kling, Rainer (Editor)
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2022]
Literature type: Book
Language: English
Series: Proceedings of SPIE--the International Society for Optical Engineering ; volume 11989. 0277-786X
Subjects:
Item Description: "At SPIE LASE" -- Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510648494
CLC: TN249-532
Call Number: TN249-532/L343-8/2022