Cover is for reference only

Optical microlithography：technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

Saved in:
Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Stover Harry L
Published: SPIE--the International Society for Optical Engineering,
Publisher Address: Bellingham, Wash.
Publication Dates: c1982.
Literature type: Book
Language: English
Series: Proceedings of SPIE--the International Society for Optical Engineering ; v. 334
Subjects:
Microlithography > Congresses
Integrated circuits > Very large scale integration > Congresses
Carrier Form: viii, 265 p.: ill. ; 28 cm.
ISBN: 0892523697 (pbk.)
Index Number: TS828
CLC: TS828-532
Call Number: TS828-53/O62/
Contents: "In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."
Includes bibliographical references and indexes.

Related Book Recommendations