Environmental issues with materials and processes for the electronics and semiconductor industries:proceedings of the fourth international symposium

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Bibliographic Details
Corporate Authors: Electrochemical Society. Dielectric Science and Technology Division.; Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries 2001 Washington, D.C.) (Washington, D.C.)); Electrochemical Society. Meeting 2001 Washington, D.C.) (Washington, D.C.))
Group Author: Mendicino L.; (Laura)
Published: Electrochemical Society, Inc.,
Publisher Address: Pennington, NJ
Publication Dates: c2001.
Literature type: Book
Language: English
Series: Proceedings ; v. 2001-6.
Subjects:
Carrier Form: vii, 212 p.: ill. ; 26 cm.
ISBN: 1566773121
Index Number: X76
CLC: X76-532
Call Number: X76-532/E617/2001
Contents: "The Fourth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 199th Meeting of the Electrochemical Society in Washington, DC."--Pref.
"Dielectric Science and Technology Division."
Includes bibliographical references and index.