Environmental issues with materials and processes for the electronics and semiconductor industries:proceedings of the fourth international symposium
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Corporate Authors: | ; ; |
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Group Author: | ; |
Published: |
Electrochemical Society, Inc.,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c2001. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings ; v. 2001-6. |
Subjects: | |
Carrier Form: | vii, 212 p.: ill. ; 26 cm. |
ISBN: | 1566773121 |
Index Number: | X76 |
CLC: | X76-532 |
Call Number: | X76-532/E617/2001 |
Contents: |
"The Fourth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 199th Meeting of the Electrochemical Society in Washington, DC."--Pref. "Dielectric Science and Technology Division." Includes bibliographical references and index. |