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Environmental issues with materials and processes for the electronics and semiconductor industries V：proceedings of the international symposium

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Bibliographic Details
Corporate Authors: Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries (5th 2002 Philadelphia, Pa.); Electrochemical Society. Dielectric Science and Technology Division.; Electrochemical Society. Meeting 2002 Philadelphia, Pa.) (Philadelphia, Pa.))
Group Author: Mendicino L.; (Laura)
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c2002.
Literature type: Book
Language: English
Series: Proceedings ; v. 2002-15.
Subjects:
Photochemistry > Environmental aspects
Electronic industries > Environmental aspects
Electrochemistry > Environmental aspects
Carrier Form: viii, 262 p.: ill. ; 24 cm.
ISBN: 1566773377
Index Number: X76
CLC: X76-532
Call Number: X76-532/E617/2002
Contents: "The Fifth Annual Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries was held at the 201st Meeting of the Electrochemical Society in Philadelphia, PA"--Pref.
"Sponsoring divisions, Dielectric Science and Technology Division."
Includes bibliographical references and indexes.

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