Analytical techniques for semiconductor materials and process characterization:proceedings of the satellite symposium to ESSDERC 89 Berlin

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Bibliographic Details
Corporate Authors: Electrochemical Society. Electronics Division; Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation (1989 Berlin, Germany); European Solid State Device Research Conference 1989 Berlin, Germany)
Group Author: Vandervorst Wilfried; Kolbesen Bernd O; Mc Caughan Daniel V
Published: Electrochemical Society,
Publisher Address: Pennington, NJ
Publication Dates: c1990.
Literature type: Book
Language: English
Series: Proceedings / Electrochemical Society ; v. 90-11
Subjects:
Carrier Form: viii, 364 p.: ill. ; 23 cm.
Index Number: TN304
CLC: TN304-532
Call Number: TN304-53/A532/1989/
Contents: "Papers presented at the Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation, in Berlin, September 15, 1989"--P. iii.
Includes bibliographical references and indexes.