Analytical techniques for semiconductor materials and process characterization:proceedings of the satellite symposium to ESSDERC 89 Berlin
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Corporate Authors: | ; ; |
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Group Author: | ; ; |
Published: |
Electrochemical Society,
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Publisher Address: | Pennington, NJ |
Publication Dates: | c1990. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings / Electrochemical Society ; v. 90-11 |
Subjects: | |
Carrier Form: | viii, 364 p.: ill. ; 23 cm. |
Index Number: | TN304 |
CLC: | TN304-532 |
Call Number: | TN304-53/A532/1989/ |
Contents: |
"Papers presented at the Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation, in Berlin, September 15, 1989"--P. iii. Includes bibliographical references and indexes. |