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Surface scattering and diffraction III：4-6 August, 2003, San Diego, California, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Maradudin A. A.; Gu Zu-Han.
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2003.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 5189
Subjects:
Diffractive scattering
Optical measurements
Scattering (Physics)
Metrology
Surface roughness > Measurement
Carrier Form: vii, 198 p.: ill. ; 28 cm.
ISBN: 0819450626
Index Number: O436
CLC: O436-532
O441.5-532
TH74-532
Call Number: TH74-532/S961/2003
Contents: Previous symposia entitled: Surface scattering and diffraction for advanced metrology.
Includes bibliographical references and author index.

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