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Surface scattering and diffraction for advanced metrology：1 August 2001, San Diego, USA

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers
Group Author: Maradudin A. A.; Gu Zu-Han.
Published: SPIE,
Publisher Address: Bellingham, Wash., USA
Publication Dates: c2001.
Literature type: Book
Language: English
Series: SPIE proceedings series ; v. 4447
Subjects:
Diffractive scattering
Optical measurements
Scattering (Physics)
Metrology
Surface roughness > Measurement
Carrier Form: vii, 164 p.: ill. ; 28 cm.
ISBN: 0819441619
Index Number: TH74
CLC: TH74-532
O436-532
O441.5-532
Call Number: TH74-532/S961/2001
Contents: Includes bibliographical references and index.

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