Screen Library触媒CVD(Cat‐CVD)の新展開 = =Recent developments of catalytic CVD (hot‐wire CVD)：ラジカルを用いる新プロセス技術
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| Main Authors: | |
|---|---|
| Published: |
シーエムシー出版
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| Publisher Address: | 東京 |
| Publication Dates: | 2013.11 |
| Literature type: | Book |
| Language: | Japanese |
| Edition: | 普及版 |
| Series: |
CMCテクニカルライブラリー. エレクトロニクスシリーズ ; 481 |
| Subjects: | |
| Carrier Form: | v, 276p: 挿図 ; 26cm |
| ISBN: | 9784781307404 |
| Index Number: | TB43 |
| CLC: | TB43 |
| Call Number: | WJTB43/5021 |
| Contents: | 文献: 章末 |