ULSI science and technology, 1989

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Bibliographic Details
Corporate Authors: International Symposium on Ultra Large Scale Integration Science and Technology; Electrochemical Society
Group Author: Osburn C. M
Published:
Publisher Address: Pennington, NJ
Literature type: Book
Language: English
Series: Proceedings / The Electrochemical Society
Subjects:
Carrier Form: xi, 775 p.:
Index Number: TN47
CLC: TN47-532