Semiconductor technology:processing and novel fabrication techniques
Saved in:
Group Author: | ; ; |
---|---|
Published: |
Wiley,
|
Publisher Address: | New York |
Publication Dates: | c1997. |
Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | xviii, 240 p.: ill. ; 24 cm. |
ISBN: | 0471127922 (cloth : acid-free paper) |
Index Number: | TN305 |
CLC: | TN305-53 |
Call Number: | TN305-53/S471.3/ |
Contents: |
"A Wiley-Interscience publication." Includes bibliographical references and index. |