Semiconductor technology:processing and novel fabrication techniques

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Bibliographic Details
Group Author: Levinshteĭn M. E.; (Mikhail Efimovich); Shur Michael.
Published: Wiley,
Publisher Address: New York
Publication Dates: c1997.
Literature type: Book
Language: English
Subjects:
Carrier Form: xviii, 240 p.: ill. ; 24 cm.
ISBN: 0471127922 (cloth : acid-free paper)
Index Number: TN305
CLC: TN305-53
Call Number: TN305-53/S471.3/
Contents: "A Wiley-Interscience publication."
Includes bibliographical references and index.