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Modeling aspects in optical metrology VI : 26-28 June 2017, Munich, Germany /

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Bibliographic Details
Corporate Authors: Modeling Aspects in Optical Metrology Conference Munich, Germany; SPIE Society
Group Author: Bodermann, Bernd; Frenner, Karsten; Silver, Richard M
Published: SPIE,
Publisher Address: Bellingham, Washington :
Publication Dates: [2017]
Literature type: Book
Language: English
Series: Proceedings of SPIE, volume 10330
Subjects:
Optical measurements > Congresses
Integrated circuits > Congresses
Semiconductors > Design and construction > Congresses
Item Description: "SPIE. Optical Metrology"--Cover.
Carrier Form: 1 volume (various pagings) : illustrations, forms ; 28 cm.
Bibliography: Includes bibliographical references.
ISBN: 9781510611054 (paperback) :
1510611053 (paperback)
CLC: TN4-532
O432.2-532
Call Number: O432.2-532/M689/2017

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