Micromachining and microfabrication process technology XVI:25 and 27 January 2011, San Francisco, California, United States
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Corporate Authors: | |
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Group Author: | ; ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2011. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 7926 |
Subjects: | |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
9780819484635 0819484636 |
Index Number: | TH11 |
CLC: | TH11-532 |
Call Number: | TH11-532/M626.2/2011 |
Contents: | Includes bibliographical references. |