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Micromachining and microfabrication process technology XV：26 January 2010, San Francisco, California, United States

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Bibliographic Details
Corporate Authors: SPIE Society
Group Author: Chiao Jung-Chih; Resnick Paul J; Perez-Maher Mary Ann
Published: SPIE,
Publisher Address: Bellingham, Wash.
Publication Dates: c2010.
Literature type: Book
Language: English
Series: Proceedings of SPIE ; v. 7590
Subjects:
Microfabrication
Electromechanical devices > Design and construction
Miniature electronic equipment > Design and construction
Micromachining
Carrier Form: 1 v. (various pagings): ill. ; 27 cm.
ISBN: 9780819479860
0819479861
Index Number: TH11
CLC: TH11-532
Call Number: TH11-532/M626.2/2010
Contents: Includes bibliographical references.

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