Reliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices XII:23-24 January 2012, San Francisco, California, United States
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Corporate Authors: | ; ; ; |
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Group Author: | ; |
Published: |
SPIE,
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Publisher Address: | Bellingham, Wash. |
Publication Dates: | c2012. |
Literature type: | Book |
Language: | English |
Series: |
Proceedings of SPIE ; v. 8250 |
Subjects: | |
Item Description: | SPIE digital library. |
Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
ISBN: |
9780819488930 0819488933 |
Index Number: | TN406 |
CLC: | TN406-532 |
Call Number: | TN406-532/R382/2012 |
Contents: | Includes bibliographical references. |