Screen LibraryReliability, packaging, testing, and characterization of MEMS/MOEMS and nanodevices XII：23-24 January 2012, San Francisco, California, United States
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| Corporate Authors: | ; ; ; |
|---|---|
| Group Author: | ; |
| Published: |
SPIE,
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| Publisher Address: | Bellingham, Wash. |
| Publication Dates: | c2012. |
| Literature type: | Book |
| Language: | English |
| Series: |
Proceedings of SPIE ; v. 8250 |
| Subjects: | |
| Item Description: | SPIE digital library. |
| Carrier Form: | 1 v. (various pagings): ill. ; 28 cm. |
| ISBN: |
9780819488930 0819488933 |
| Index Number: | TN406 |
| CLC: | TN406-532 |
| Call Number: | TN406-532/R382/2012 |
| Contents: | Includes bibliographical references. |