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Fast simulation of electro-thermal MEMS：efficient dynamic compact models

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Bibliographic Details
Main Authors: Bechtold T. (Tamara)
Group Author: Korvink J. G.; (Jan G.); Rudnyi E. B.; (Evgenii B.)
Published: Springer,
Publisher Address: Berlin New York
Publication Dates: 2007.
Literature type: Book
Language: English
Series: Microtechnology and MEMS
Subjects:
Microelectromechanical systems > Mathematical models.
Carrier Form: xi, 180 p.: ill. (some col.) ; 24 cm.
ISBN: 3540346120 (hd.bd.)
9783540346128 (hd.bd.)
Index Number: TH
CLC: TH-39
TN402-05
TN402
Call Number: TN402/B392
Contents: Includes bibliographical references (p. [143]-155) and index.

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