Micro electro mechanical systems (MEMS):technology, fabrication processes, and applications
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Group Author: | ; |
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Published: |
Nova Science Publishers,
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Publisher Address: | Hauppauge, N.Y. |
Publication Dates: | c2010. |
Literature type: | Book |
Language: | English |
Subjects: | |
Carrier Form: | xii, 391 p.: ill. (some col.) ; 27 cm. |
ISBN: |
9781608764747 (hardcover : alk. paper) 1608764745 (hardcover : alk. paper) |
Index Number: | TH |
CLC: |
TH-39 TM38 |
Call Number: | TH-39/M626-1 |
Contents: | Includes bibliographical references and index. |