Screen LibraryMicro electro mechanical systems (MEMS)：technology, fabrication processes, and applications
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| Group Author: | ; |
|---|---|
| Published: |
Nova Science Publishers,
|
| Publisher Address: | Hauppauge, N.Y. |
| Publication Dates: | c2010. |
| Literature type: | Book |
| Language: | English |
| Subjects: | |
| Carrier Form: | xii, 391 p.: ill. (some col.) ; 27 cm. |
| ISBN: |
9781608764747 (hardcover : alk. paper) 1608764745 (hardcover : alk. paper) |
| Index Number: | TH |
| CLC: |
TH-39 TM38 |
| Call Number: | TH-39/M626-1 |
| Contents: | Includes bibliographical references and index. |